Erdélyi Miklós
Resolution enhancement techniques in optical microlithography based on multiple imaging.
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| Item Type: | Thesis (Doctoral thesis (PhD)) |
|---|---|
| Creators: | Erdélyi Miklós |
| Supervisor(s): | Supervisor Position, academic title, institution MTMT author ID Bor Zsolt Prof. Dr., Optikai és Kvantumelektronikai Tanszék 10000960 |
| Subjects: | 01. Natural sciences 01. Natural sciences > 01.03. Physical sciences |
| Divisions: | Doctoral School of Physics |
| Discipline: | Natural Sciences > Physics |
| Language: | English |
| Date: | 1999 |
| Additional Information: | PhD ; Terjedelem: VIII, 87 lev. + Tézis [5] lev. + 2 db opp. vélemény |
| Uncontrolled Keywords: | Fizika |
| Item ID: | 4297 |
| Date Deposited: | 2022. Mar. 08. 08:59 |
| Last Modified: | 2022. Mar. 08. 08:59 |
| Depository no.: | B 3659 |
| URI: | https://doktori.bibl.u-szeged.hu/id/eprint/4297 |
| Defence/Citable status: | Defended. |
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