Resolution enhancement techniques in optical microlithography based on multiple imaging

Erdélyi Miklós
Resolution enhancement techniques in optical microlithography based on multiple imaging.
[Thesis] (Unpublished)

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Item Type: Thesis (Doktori értekezés)
Creators: Erdélyi Miklós
Subjects: 01. Natural sciences
01. Natural sciences > 01.03. Physical sciences
Divisions: Doctoral School of Physics
Tudományterület / tudományág: Natural Sciences > Physics
Nyelv: English
Date: 1999
Additional Information: PhD ; Terjedelem: VIII, 87 lev. + Tézis [5] lev. + 2 db opp. vélemény
Uncontrolled Keywords: Fizika
Item ID: 4297
Date Deposited: 2022. Mar. 08. 08:59
Last Modified: 2022. Mar. 08. 08:59
Depository no.: B 3659
URI: https://doktori.bibl.u-szeged.hu/id/eprint/4297
Defence/Citable status: Defended.

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