Resolution enhancement techniques in optical microlithography based on multiple imaging

Erdélyi Miklós
Resolution enhancement techniques in optical microlithography based on multiple imaging.
Doctoral thesis (PhD), József Attila Tudományegyetem (1962-1999).
(1999) (Unpublished)

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Item Type: Thesis (Doctoral thesis (PhD))
Creators: Erdélyi Miklós
Supervisor(s):
Supervisor
Position, academic title, institution
MTMT author ID
Bor Zsolt
Prof. Dr., Optikai és Kvantumelektronikai Tanszék
10000960
Subjects: 01. Natural sciences
01. Natural sciences > 01.03. Physical sciences
Divisions: Doctoral School of Physics
Discipline: Natural Sciences > Physics
Language: English
Date: 1999
Additional Information: PhD ; Terjedelem: VIII, 87 lev. + Tézis [5] lev. + 2 db opp. vélemény
Uncontrolled Keywords: Fizika
Item ID: 4297
Date Deposited: 2022. Mar. 08. 08:59
Last Modified: 2022. Mar. 08. 08:59
Depository no.: B 3659
URI: https://doktori.bibl.u-szeged.hu/id/eprint/4297
Defence/Citable status: Defended.

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